AFM University Introduction to Atomic Force Microscopy by Paul West

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Scanner Qualifications
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Certification of an AFM scanner to assures that it meets specifications requires that several tests be made. This document offers the test protocol used for assuring that a scanner meets its specifications. An example of a specification and pass criteria is presented in the following table:

# Name of Test Pass Criteria
1 Scan Range
Z-Range		 > 80µm
>8 µm
2 X-Calibration Check
Y-Calibration Check
Z-Calibration Check		 2.99 0.02 μm
2.99 0.02 μm
19.5 0.8 μm
3
Non-Linearity:
  X Over Full Range
  Y Over Full Range
  Z Over Full Range
 
< 1%  
< 1%  
< 1%  
4
Non-Orthogonality:
  XY
  ZX
  ZY
 
< 1%  
< 1%  
< 1%  
5
Noise Level:
  Z actuator
  Z sensor
 
< 0.08 nm, rms  
< 0.20 nm, rms  
All measurements are made in vibrating mode with the stage on a vibration table and in an acoustic enclosure. Samples and supplies required to certify the scanner are:
Samples required:
1. VLSI STR10-180P, pitch = 10.0 μm
2. VLSI STS3-180P, pitch = 2.99 0.02 μm
3. NT-MDT, TGG01, triangle, pitch = 3.0 μm
   
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