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AFM Standards and References
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Introduction |
Standards and references are required for proper operation of an AFM and
to verify optimal operating conditions and calibration of the instruments.
Standards are used to assure that the absolute measurements are correct,
while references assure that the instrument is giving consistent results.
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For establishing calibrated topography measurements, the AFM scanner
must be certified with calibration standards having pre-established
dimensions in the X, Y and Z axis. References can be used for establishing
that an AFM mode is operating correctly and for establishing the proper
operation of the AFM.
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This guide serves as a reference for finding standards and references that
are helpful for making meaningful measurements with an AFM. When
possible several vendors for a particular type of standard are listed.
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| Z Calibration |
Calibration standards/references are needed to calibrate SPM in the
vertical axis. For calibrations greater than 10 nm step height, standards or
references are typically fabricated by etching patterns in a quartz substrate.
Another source for references is etched silicon, or silicon dioxide coated
with a uniform layer of metal. When calibrating the instrument for Z
height measurements below 10 nm, nano-spheres, atomic terraces of
silicon or HOPG may be used as a reference specimen.
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