In 1971 Russell Young4 demonstrated a non-contact type of stylus
profiler. In his profiler, called the topographiner, Young used the fact
that the electron field emission current between a sharp metal probe and
a surface is very dependent on the probe sample distance for electrically
conductive samples. In the topographiner, see (Figure 1-5), the probe was
mounted directly on a piezoelectric ceramic used to move the probe
in a vertical direction above the surface. An electronic feedback circuit
monitoring the electron emission was then used to drive the piezoceramic
and thus keep the probe sample spacing fixed. Then, with piezoelectric
ceramics, the probe was used to scan the surface in the horizontal (XY)
dimensions. By monitoring the X-Y and Z position of the probe, a
3-D image of the surface was constructed. The resolution of Young’s
instrument was controlled by the instrument’s vibrations.
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