Figure 2-6 illustrates the primary components of an AFM stage. There is an AFM scanner that measures the force between the probe and surface and scans the probe over the surface. There is a motion control mechanism, the Z motor, which can move the AFM scanner towards the sample. There is also an X-Y positioning stage which is not required but is useful for positioning the feature for imaging under the probe as well as an optical microscope for viewing the probe and surface. A mechanical structure is required to support the AFM scanner. |